1 Semiconductor Crystals. - 1. 1 Crystals and Crystallographic Orientations. - 1. 2 The Silicon Crystal. - 1. 3 Wafer Preparation. - 1. 4 Compound Semiconductors. - 2 Thermal Oxidation and Nitridation. - 2. 1 SiO2 and SiO2-Si Interface. - 2. 2 Thermal Oxidation. - 2. 3 Silicon Nitride. - 3 Thin Film Deposition. - 3. 1 Chemical Vapor Deposition. - 3. 2 Chemical-Physical Deposition Processes. - 3. 3 Physical-Vapor Deposition. - 4 Lithography. - 4. 1 Optical Lithography. - 4. 2 Resolution Enhancement Techniques. - 4. 3 Electron-Beam Lithography. - 4. 4 X-Ray Lithography. - 4. 5 Ion-Beam Lithography. - 5 Contamination Control and Etch. - 5. 1 Clean Processes. - 5. 2 Etching. - 6 Ion Implantation. - 6. 1 Principle of Operation. - 6. 2 Energy Loss and Range Distribution. - 6. 3 Crystal Damage and Dopant Activity. - 7 Diffusion. - 7. 1 Point Defects. - 7. 2 Fick's Laws. - 7. 3 Non-Constant Diffusivity. - 7. 4 Diffusion in Polysilicon. - 7. 5 Diffusion in Insulators. - 7. 6 Diffusion Sources. - 7. 7 Gettering in Silicon. - 8 Contact and Interconnect Technology. - 8. 1 Contact Metallurgy. - 8. 2 Poly-Metal Dielectrics. - 8. 3 Metal Interconnects. - 8. 4 Inter-Level Dielectrics. - 8. 5 Multi-Level Metals. - 8. 6 Reliability Considerations. Language: English